WaferMark® SigmaClean® 300 FOUP
- 300mm Automated Wafer Marking System

  Provides all the compatibility you need for automated 300mm production.
Patented SuperSoftMark® for debris-free wafer marking
Class 1 clean room compatibility
SECS II/GEM-HSMS interface for factory communication/networking
 Two FOUP stations
Optional read and scribe conforms to SEMI M1.15 (T7 & M12 SEMI specs)
Optional edge handling robot and aligner
Windows® NT-based software