The
first production-proven laser fuse processing system
featuring “total solution” system technology
to combine a
small 0.7μm laser spot size with the beam
placement accuracy and stable, precise energy control to
enable aggressive fuse pitch shrinks below 1.5μm for
90nm and 70nm designs.
Patented high-speed positioning system optimizes throughput
and enables a 70,000 links/second processing rate
High-yield
process control capability: ultra stable,
ultra-fine energy setting for accuracy, range, and
resolution – a critical laser redundancy process
requirement for today’s and the next generation of ultra fine pitch links
